Leach R Fundamental Principles of Engineering Nanometrology 2ed 2014
General:
Name: Leach R Fundamental Principles of Engineering Nanometrology 2ed 2014
Format: pdf
Size: 22.89 MB
Book:
Title: Fundamental Principles of Engineering Nanometrology
Author: Richard Leach
Language: polski
Year: 2009
Subjects: Science & Technology, Engineering, Industrial Engineering & Materials Science, Engineering – Industrial
Publisher: William Andrew
ISBN: 9781437778328
Total pages: 384
Description:
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. – Provides a basic introduction to measurement and instruments – Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force – Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) – Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) – Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
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